9/29/2010	12:05:52 AM	H2 valve closed
9/29/2010	12:05:52 AM	BCl3 valve closed
9/29/2010	12:05:52 AM	PH3 valve closed
9/29/2010	12:05:52 AM	SiCl4 pre valve closed
9/29/2010	12:05:52 AM	SiCl4 post valve closed
9/29/2010	12:05:52 AM	Main Vac valve closed
9/29/2010	12:05:52 AM	Bypass valve closed
9/29/2010	12:05:52 AM	Helium valve opened
9/29/2010	12:05:52 AM	Bubbler valve opened
9/29/2010	12:05:52 AM	Helium MFC set to  500.000000
9/29/2010	12:05:52 AM	H2 MFC set to  0.000000
9/29/2010	12:05:52 AM	BCl3 MFC set to  0.000000
9/29/2010	12:05:52 AM	PHl3 MFC set to  0.000000
9/29/2010	12:05:52 AM	SiCl4 MFC set to  0.000000
9/29/2010	12:05:52 AM	Bypass solenoid MFC set to  0.000000
9/29/2010	12:05:52 AM	Tube furnace set to 0
9/29/2010	12:25:52 AM	Helium valve closed
9/29/2010	12:25:52 AM	H2 valve closed
9/29/2010	12:25:52 AM	BCl3 valve closed
9/29/2010	12:25:52 AM	PH3 valve closed
9/29/2010	12:25:52 AM	SiCl4 pre valve closed
9/29/2010	12:25:52 AM	SiCl4 post valve closed
9/29/2010	12:25:52 AM	Main Vac valve closed
9/29/2010	12:25:52 AM	Bypass valve closed
9/29/2010	12:25:52 AM	Bubbler valve closed
9/29/2010	12:25:52 AM	Helium MFC set to  0.000000
9/29/2010	12:25:52 AM	H2 MFC set to  0.000000
9/29/2010	12:25:52 AM	BCl3 MFC set to  0.000000
9/29/2010	12:25:52 AM	PHl3 MFC set to  0.000000
9/29/2010	12:25:52 AM	SiCl4 MFC set to  0.000000
9/29/2010	12:25:52 AM	Bypass solenoid MFC set to  0.000000
9/29/2010	12:25:52 AM	Tube furnace set to 0
9/29/2010	12:25:52 AM	Run finished at 12:25 AM
9/29/2010	12:42:48 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/29/2010	12:42:49 AM	Recipe started at 12:42 AM
9/29/2010	12:42:49 AM	H2 valve closed
9/29/2010	12:42:49 AM	BCl3 valve closed
9/29/2010	12:42:49 AM	PH3 valve closed
9/29/2010	12:42:49 AM	SiCl4 pre valve closed
9/29/2010	12:42:49 AM	SiCl4 post valve closed
9/29/2010	12:42:49 AM	Main Vac valve closed
9/29/2010	12:42:49 AM	Bypass valve closed
9/29/2010	12:42:49 AM	Bubbler valve closed
9/29/2010	12:42:49 AM	Helium valve opened
9/29/2010	12:42:49 AM	Helium MFC set to  500.000000
9/29/2010	12:42:49 AM	H2 MFC set to  0.000000
9/29/2010	12:42:49 AM	BCl3 MFC set to  0.000000
9/29/2010	12:42:49 AM	PHl3 MFC set to  0.000000
9/29/2010	12:42:49 AM	SiCl4 MFC set to  0.000000
9/29/2010	12:42:49 AM	Bypass solenoid MFC set to  0.000000
9/29/2010	12:42:49 AM	Tube furnace set to 0
9/29/2010	12:42:55 AM	Helium valve closed
9/29/2010	12:42:55 AM	H2 valve closed
9/29/2010	12:42:55 AM	BCl3 valve closed
9/29/2010	12:42:55 AM	PH3 valve closed
9/29/2010	12:42:55 AM	SiCl4 pre valve closed
9/29/2010	12:42:55 AM	SiCl4 post valve closed
9/29/2010	12:42:55 AM	Main Vac valve closed
9/29/2010	12:42:55 AM	Bypass valve closed
9/29/2010	12:42:55 AM	Bubbler valve closed
9/29/2010	12:42:55 AM	Helium MFC set to  0.000000
9/29/2010	12:42:55 AM	H2 MFC set to  0.000000
9/29/2010	12:42:55 AM	BCl3 MFC set to  0.000000
9/29/2010	12:42:55 AM	PHl3 MFC set to  0.000000
9/29/2010	12:42:55 AM	SiCl4 MFC set to  0.000000
9/29/2010	12:42:55 AM	Bypass solenoid MFC set to  0.000000
9/29/2010	12:42:55 AM	Tube furnace set to 0
9/29/2010	12:42:55 AM	Run finished at 12:42 AM
9/29/2010	12:42:55 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/29/2010	12:50:39 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/29/2010	12:50:39 AM	Recipe started at 12:50 AM
9/29/2010	12:50:39 AM	Helium valve closed
9/29/2010	12:50:39 AM	H2 valve closed
9/29/2010	12:50:39 AM	BCl3 valve closed
9/29/2010	12:50:39 AM	PH3 valve closed
9/29/2010	12:50:39 AM	SiCl4 pre valve closed
9/29/2010	12:50:39 AM	SiCl4 post valve closed
9/29/2010	12:50:39 AM	Main Vac valve closed
9/29/2010	12:50:39 AM	Bubbler valve closed
9/29/2010	12:50:39 AM	Bypass valve opened
9/29/2010	12:50:39 AM	Helium MFC set to  0.000000
9/29/2010	12:50:39 AM	H2 MFC set to  0.000000
9/29/2010	12:50:39 AM	BCl3 MFC set to  0.000000
9/29/2010	12:50:39 AM	PHl3 MFC set to  0.000000
9/29/2010	12:50:39 AM	SiCl4 MFC set to  0.000000
9/29/2010	12:50:39 AM	Bypass solenoid MFC set to  0.000000
9/29/2010	12:50:39 AM	Tube furnace set to 0
9/29/2010	12:50:53 AM	Run aborted at 12:50 AM
9/29/2010	12:50:53 AM	Helium valve closed
9/29/2010	12:50:53 AM	H2 valve closed
9/29/2010	12:50:53 AM	BCl3 valve closed
9/29/2010	12:50:53 AM	PH3 valve closed
9/29/2010	12:50:53 AM	SiCl4 pre valve closed
9/29/2010	12:50:53 AM	SiCl4 post valve closed
9/29/2010	12:50:53 AM	Bypass valve closed
9/29/2010	12:50:53 AM	Main Vac valve closed
9/29/2010	12:50:53 AM	Bubbler valve closed
9/29/2010	12:50:53 AM	Helium MFC set to  0.000000
9/29/2010	12:50:53 AM	H2 MFC set to  0.000000
9/29/2010	12:50:53 AM	BCl3 MFC set to  0.000000
9/29/2010	12:50:53 AM	PHl3 MFC set to  0.000000
9/29/2010	12:50:53 AM	SiCl4 MFC set to  0.000000
9/29/2010	12:50:53 AM	Tube furnace set to 0
9/29/2010	12:50:53 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/29/2010	12:52:19 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/29/2010	12:52:19 AM	Recipe started at 12:52 AM
9/29/2010	12:52:19 AM	Helium valve closed
9/29/2010	12:52:19 AM	H2 valve closed
9/29/2010	12:52:19 AM	BCl3 valve closed
9/29/2010	12:52:19 AM	PH3 valve closed
9/29/2010	12:52:19 AM	SiCl4 pre valve closed
9/29/2010	12:52:19 AM	SiCl4 post valve closed
9/29/2010	12:52:19 AM	Main Vac valve closed
9/29/2010	12:52:19 AM	Bubbler valve closed
9/29/2010	12:52:19 AM	Bypass valve opened
9/29/2010	12:52:19 AM	Helium MFC set to  0.000000
9/29/2010	12:52:19 AM	H2 MFC set to  0.000000
9/29/2010	12:52:19 AM	BCl3 MFC set to  0.000000
9/29/2010	12:52:19 AM	PHl3 MFC set to  0.000000
9/29/2010	12:52:19 AM	SiCl4 MFC set to  0.000000
9/29/2010	12:52:19 AM	Bypass solenoid MFC set to  0.000000
9/29/2010	12:52:19 AM	Tube furnace set to 0
9/29/2010	12:53:06 AM	Helium valve closed
9/29/2010	12:53:06 AM	H2 valve closed
9/29/2010	12:53:06 AM	BCl3 valve closed
9/29/2010	12:53:06 AM	PH3 valve closed
9/29/2010	12:53:06 AM	SiCl4 pre valve closed
9/29/2010	12:53:06 AM	SiCl4 post valve closed
9/29/2010	12:53:06 AM	Bubbler valve closed
9/29/2010	12:53:06 AM	Main Vac valve opened
9/29/2010	12:53:06 AM	Bypass valve opened
9/29/2010	12:53:06 AM	Helium MFC set to  0.000000
9/29/2010	12:53:06 AM	H2 MFC set to  0.000000
9/29/2010	12:53:06 AM	BCl3 MFC set to  0.000000
9/29/2010	12:53:06 AM	PHl3 MFC set to  0.000000
9/29/2010	12:53:06 AM	SiCl4 MFC set to  0.000000
9/29/2010	12:53:06 AM	Bypass solenoid MFC set to  0.000000
9/29/2010	12:53:06 AM	Tube furnace set to 0
9/29/2010	12:53:06 AM	Run finished at 12:53 AM
9/29/2010	12:53:06 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/29/2010	12:55:15 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/29/2010	12:55:27 AM	Recipe started at 12:55 AM
9/29/2010	12:55:27 AM	Helium valve closed
9/29/2010	12:55:27 AM	H2 valve closed
9/29/2010	12:55:27 AM	BCl3 valve closed
9/29/2010	12:55:27 AM	PH3 valve closed
9/29/2010	12:55:27 AM	SiCl4 pre valve closed
9/29/2010	12:55:27 AM	SiCl4 post valve closed
9/29/2010	12:55:27 AM	Main Vac valve closed
9/29/2010	12:55:27 AM	Bubbler valve closed
9/29/2010	12:55:27 AM	Bypass valve opened
9/29/2010	12:55:27 AM	Helium MFC set to  0.000000
9/29/2010	12:55:27 AM	H2 MFC set to  0.000000
9/29/2010	12:55:27 AM	BCl3 MFC set to  0.000000
9/29/2010	12:55:27 AM	PHl3 MFC set to  0.000000
9/29/2010	12:55:27 AM	SiCl4 MFC set to  0.000000
9/29/2010	12:55:27 AM	Bypass solenoid MFC set to  0.000000
9/29/2010	12:55:27 AM	Tube furnace set to 0
9/29/2010	12:55:27 AM	Helium valve closed
9/29/2010	12:55:27 AM	H2 valve closed
9/29/2010	12:55:27 AM	BCl3 valve closed
9/29/2010	12:55:27 AM	PH3 valve closed
9/29/2010	12:55:27 AM	SiCl4 pre valve closed
9/29/2010	12:55:27 AM	SiCl4 post valve closed
9/29/2010	12:55:27 AM	Bubbler valve closed
9/29/2010	12:55:27 AM	Main Vac valve opened
9/29/2010	12:55:27 AM	Bypass valve opened
9/29/2010	12:55:27 AM	Helium MFC set to  0.000000
9/29/2010	12:55:27 AM	H2 MFC set to  0.000000
9/29/2010	12:55:27 AM	BCl3 MFC set to  0.000000
9/29/2010	12:55:27 AM	PHl3 MFC set to  0.000000
9/29/2010	12:55:27 AM	SiCl4 MFC set to  0.000000
9/29/2010	12:55:27 AM	Bypass solenoid MFC set to  0.000000
9/29/2010	12:55:27 AM	Tube furnace set to 0
9/29/2010	12:56:27 AM	H2 valve closed
9/29/2010	12:56:27 AM	BCl3 valve closed
9/29/2010	12:56:27 AM	PH3 valve closed
9/29/2010	12:56:27 AM	SiCl4 pre valve closed
9/29/2010	12:56:27 AM	SiCl4 post valve closed
9/29/2010	12:56:27 AM	Bubbler valve closed
9/29/2010	12:56:27 AM	Helium valve opened
9/29/2010	12:56:27 AM	Main Vac valve opened
9/29/2010	12:56:27 AM	Bypass valve opened
9/29/2010	12:56:27 AM	Helium MFC set to  100.000000
9/29/2010	12:56:27 AM	H2 MFC set to  0.000000
9/29/2010	12:56:27 AM	BCl3 MFC set to  0.000000
9/29/2010	12:56:27 AM	PHl3 MFC set to  0.000000
9/29/2010	12:56:27 AM	SiCl4 MFC set to  0.000000
9/29/2010	12:56:27 AM	Bypass solenoid MFC set to  0.000000
9/29/2010	12:56:28 AM	Tube furnace set to 0
9/29/2010	12:57:28 AM	Helium valve closed
9/29/2010	12:57:28 AM	H2 valve closed
9/29/2010	12:57:28 AM	BCl3 valve closed
9/29/2010	12:57:28 AM	PH3 valve closed
9/29/2010	12:57:28 AM	SiCl4 pre valve closed
9/29/2010	12:57:28 AM	SiCl4 post valve closed
9/29/2010	12:57:28 AM	Bubbler valve closed
9/29/2010	12:57:28 AM	Main Vac valve opened
9/29/2010	12:57:28 AM	Bypass valve opened
9/29/2010	12:57:28 AM	Helium MFC set to  0.000000
9/29/2010	12:57:28 AM	H2 MFC set to  0.000000
9/29/2010	12:57:28 AM	BCl3 MFC set to  0.000000
9/29/2010	12:57:28 AM	PHl3 MFC set to  0.000000
9/29/2010	12:57:28 AM	SiCl4 MFC set to  0.000000
9/29/2010	12:57:28 AM	Bypass solenoid MFC set to  0.000000
9/29/2010	12:57:28 AM	Tube furnace set to 0
9/29/2010	12:58:28 AM	H2 valve closed
9/29/2010	12:58:28 AM	BCl3 valve closed
9/29/2010	12:58:28 AM	PH3 valve closed
9/29/2010	12:58:28 AM	SiCl4 pre valve closed
9/29/2010	12:58:28 AM	SiCl4 post valve closed
9/29/2010	12:58:28 AM	Bubbler valve closed
9/29/2010	12:58:28 AM	Helium valve opened
9/29/2010	12:58:28 AM	Main Vac valve opened
9/29/2010	12:58:28 AM	Bypass valve opened
9/29/2010	12:58:28 AM	Helium MFC set to  100.000000
9/29/2010	12:58:28 AM	H2 MFC set to  0.000000
9/29/2010	12:58:28 AM	BCl3 MFC set to  0.000000
9/29/2010	12:58:28 AM	PHl3 MFC set to  0.000000
9/29/2010	12:58:28 AM	SiCl4 MFC set to  0.000000
9/29/2010	12:58:28 AM	Bypass solenoid MFC set to  0.000000
9/29/2010	12:58:28 AM	Tube furnace set to 0
9/29/2010	12:59:28 AM	Helium valve closed
9/29/2010	12:59:28 AM	H2 valve closed
9/29/2010	12:59:28 AM	BCl3 valve closed
9/29/2010	12:59:28 AM	PH3 valve closed
9/29/2010	12:59:28 AM	SiCl4 pre valve closed
9/29/2010	12:59:28 AM	SiCl4 post valve closed
9/29/2010	12:59:28 AM	Bubbler valve closed
9/29/2010	12:59:28 AM	Main Vac valve opened
9/29/2010	12:59:28 AM	Bypass valve opened
9/29/2010	12:59:28 AM	Helium MFC set to  0.000000
9/29/2010	12:59:28 AM	H2 MFC set to  0.000000
9/29/2010	12:59:28 AM	BCl3 MFC set to  0.000000
9/29/2010	12:59:28 AM	PHl3 MFC set to  0.000000
9/29/2010	12:59:28 AM	SiCl4 MFC set to  0.000000
9/29/2010	12:59:28 AM	Bypass solenoid MFC set to  0.000000
9/29/2010	12:59:28 AM	Tube furnace set to 0
9/29/2010	1:00:28 AM	H2 valve closed
9/29/2010	1:00:28 AM	BCl3 valve closed
9/29/2010	1:00:28 AM	PH3 valve closed
9/29/2010	1:00:28 AM	SiCl4 pre valve closed
9/29/2010	1:00:28 AM	SiCl4 post valve closed
9/29/2010	1:00:28 AM	Bubbler valve closed
9/29/2010	1:00:28 AM	Helium valve opened
9/29/2010	1:00:28 AM	Main Vac valve opened
9/29/2010	1:00:28 AM	Bypass valve opened
9/29/2010	1:00:28 AM	Helium MFC set to  100.000000
9/29/2010	1:00:28 AM	H2 MFC set to  0.000000
9/29/2010	1:00:28 AM	BCl3 MFC set to  0.000000
9/29/2010	1:00:28 AM	PHl3 MFC set to  0.000000
9/29/2010	1:00:28 AM	SiCl4 MFC set to  0.000000
9/29/2010	1:00:28 AM	Bypass solenoid MFC set to  0.000000
9/29/2010	1:00:28 AM	Tube furnace set to 0
9/29/2010	1:01:28 AM	Helium valve closed
9/29/2010	1:01:28 AM	H2 valve closed
9/29/2010	1:01:28 AM	BCl3 valve closed
9/29/2010	1:01:28 AM	PH3 valve closed
9/29/2010	1:01:28 AM	SiCl4 pre valve closed
9/29/2010	1:01:28 AM	SiCl4 post valve closed
9/29/2010	1:01:28 AM	Bubbler valve closed
9/29/2010	1:01:28 AM	Main Vac valve opened
9/29/2010	1:01:28 AM	Bypass valve opened
9/29/2010	1:01:28 AM	Helium MFC set to  0.000000
9/29/2010	1:01:28 AM	H2 MFC set to  0.000000
9/29/2010	1:01:28 AM	BCl3 MFC set to  0.000000
9/29/2010	1:01:28 AM	PHl3 MFC set to  0.000000
9/29/2010	1:01:28 AM	SiCl4 MFC set to  0.000000
9/29/2010	1:01:28 AM	Bypass solenoid MFC set to  0.000000
9/29/2010	1:01:29 AM	Tube furnace set to 0
9/29/2010	1:02:29 AM	H2 valve closed
9/29/2010	1:02:29 AM	BCl3 valve closed
9/29/2010	1:02:29 AM	PH3 valve closed
9/29/2010	1:02:29 AM	SiCl4 pre valve closed
9/29/2010	1:02:29 AM	SiCl4 post valve closed
9/29/2010	1:02:29 AM	Bubbler valve closed
9/29/2010	1:02:29 AM	Helium valve opened
9/29/2010	1:02:29 AM	Main Vac valve opened
9/29/2010	1:02:29 AM	Bypass valve opened
9/29/2010	1:02:29 AM	Helium MFC set to  100.000000
9/29/2010	1:02:29 AM	H2 MFC set to  0.000000
9/29/2010	1:02:29 AM	BCl3 MFC set to  0.000000
9/29/2010	1:02:29 AM	PHl3 MFC set to  0.000000
9/29/2010	1:02:29 AM	SiCl4 MFC set to  0.000000
9/29/2010	1:02:29 AM	Bypass solenoid MFC set to  0.000000
9/29/2010	1:02:29 AM	Tube furnace set to 0
9/29/2010	1:03:29 AM	Helium valve closed
9/29/2010	1:03:29 AM	H2 valve closed
9/29/2010	1:03:29 AM	BCl3 valve closed
9/29/2010	1:03:29 AM	PH3 valve closed
9/29/2010	1:03:29 AM	SiCl4 pre valve closed
9/29/2010	1:03:29 AM	SiCl4 post valve closed
9/29/2010	1:03:29 AM	Bubbler valve closed
9/29/2010	1:03:29 AM	Main Vac valve opened
9/29/2010	1:03:29 AM	Bypass valve opened
9/29/2010	1:03:29 AM	Helium MFC set to  0.000000
9/29/2010	1:03:29 AM	H2 MFC set to  0.000000
9/29/2010	1:03:29 AM	BCl3 MFC set to  0.000000
9/29/2010	1:03:29 AM	PHl3 MFC set to  0.000000
9/29/2010	1:03:29 AM	SiCl4 MFC set to  0.000000
9/29/2010	1:03:29 AM	Bypass solenoid MFC set to  0.000000
9/29/2010	1:03:29 AM	Tube furnace set to 0
9/29/2010	1:04:29 AM	H2 valve closed
9/29/2010	1:04:29 AM	BCl3 valve closed
9/29/2010	1:04:29 AM	PH3 valve closed
9/29/2010	1:04:29 AM	SiCl4 pre valve closed
9/29/2010	1:04:29 AM	SiCl4 post valve closed
9/29/2010	1:04:29 AM	Bubbler valve closed
9/29/2010	1:04:29 AM	Helium valve opened
9/29/2010	1:04:29 AM	Main Vac valve opened
9/29/2010	1:04:29 AM	Bypass valve opened
9/29/2010	1:04:29 AM	Helium MFC set to  100.000000
9/29/2010	1:04:29 AM	H2 MFC set to  0.000000
9/29/2010	1:04:29 AM	BCl3 MFC set to  0.000000
9/29/2010	1:04:29 AM	PHl3 MFC set to  0.000000
9/29/2010	1:04:29 AM	SiCl4 MFC set to  0.000000
9/29/2010	1:04:29 AM	Bypass solenoid MFC set to  0.000000
9/29/2010	1:04:29 AM	Tube furnace set to 0
9/29/2010	1:05:29 AM	Helium valve closed
9/29/2010	1:05:29 AM	H2 valve closed
9/29/2010	1:05:29 AM	BCl3 valve closed
9/29/2010	1:05:29 AM	PH3 valve closed
9/29/2010	1:05:29 AM	SiCl4 pre valve closed
9/29/2010	1:05:29 AM	SiCl4 post valve closed
9/29/2010	1:05:29 AM	Bubbler valve closed
9/29/2010	1:05:29 AM	Main Vac valve opened
9/29/2010	1:05:29 AM	Bypass valve opened
9/29/2010	1:05:29 AM	Helium MFC set to  0.000000
9/29/2010	1:05:29 AM	H2 MFC set to  0.000000
9/29/2010	1:05:29 AM	BCl3 MFC set to  0.000000
9/29/2010	1:05:29 AM	PHl3 MFC set to  0.000000
9/29/2010	1:05:29 AM	SiCl4 MFC set to  0.000000
9/29/2010	1:05:29 AM	Bypass solenoid MFC set to  0.000000
9/29/2010	1:05:29 AM	Tube furnace set to 0
9/29/2010	1:06:29 AM	H2 valve closed
9/29/2010	1:06:29 AM	BCl3 valve closed
9/29/2010	1:06:29 AM	PH3 valve closed
9/29/2010	1:06:29 AM	SiCl4 pre valve closed
9/29/2010	1:06:29 AM	SiCl4 post valve closed
9/29/2010	1:06:29 AM	Bubbler valve closed
9/29/2010	1:06:29 AM	Helium valve opened
9/29/2010	1:06:29 AM	Main Vac valve opened
9/29/2010	1:06:29 AM	Bypass valve opened
9/29/2010	1:06:29 AM	Helium MFC set to  100.000000
9/29/2010	1:06:29 AM	H2 MFC set to  0.000000
9/29/2010	1:06:29 AM	BCl3 MFC set to  0.000000
9/29/2010	1:06:29 AM	PHl3 MFC set to  0.000000
9/29/2010	1:06:29 AM	SiCl4 MFC set to  0.000000
9/29/2010	1:06:29 AM	Bypass solenoid MFC set to  0.000000
9/29/2010	1:06:30 AM	Tube furnace set to 0
9/29/2010	1:07:30 AM	Helium valve closed
9/29/2010	1:07:30 AM	H2 valve closed
9/29/2010	1:07:30 AM	BCl3 valve closed
9/29/2010	1:07:30 AM	PH3 valve closed
9/29/2010	1:07:30 AM	SiCl4 pre valve closed
9/29/2010	1:07:30 AM	SiCl4 post valve closed
9/29/2010	1:07:30 AM	Bubbler valve closed
9/29/2010	1:07:30 AM	Main Vac valve opened
9/29/2010	1:07:30 AM	Bypass valve opened
9/29/2010	1:07:30 AM	Helium MFC set to  0.000000
9/29/2010	1:07:30 AM	H2 MFC set to  0.000000
9/29/2010	1:07:30 AM	BCl3 MFC set to  0.000000
9/29/2010	1:07:30 AM	PHl3 MFC set to  0.000000
9/29/2010	1:07:30 AM	SiCl4 MFC set to  0.000000
9/29/2010	1:07:30 AM	Bypass solenoid MFC set to  0.000000
9/29/2010	1:07:30 AM	Tube furnace set to 0
9/29/2010	1:08:30 AM	H2 valve closed
9/29/2010	1:08:30 AM	BCl3 valve closed
9/29/2010	1:08:30 AM	PH3 valve closed
9/29/2010	1:08:30 AM	SiCl4 pre valve closed
9/29/2010	1:08:30 AM	SiCl4 post valve closed
9/29/2010	1:08:30 AM	Bubbler valve closed
9/29/2010	1:08:30 AM	Helium valve opened
9/29/2010	1:08:30 AM	Main Vac valve opened
9/29/2010	1:08:30 AM	Bypass valve opened
9/29/2010	1:08:30 AM	Helium MFC set to  100.000000
9/29/2010	1:08:30 AM	H2 MFC set to  0.000000
9/29/2010	1:08:30 AM	BCl3 MFC set to  0.000000
9/29/2010	1:08:30 AM	PHl3 MFC set to  0.000000
9/29/2010	1:08:30 AM	SiCl4 MFC set to  0.000000
9/29/2010	1:08:30 AM	Bypass solenoid MFC set to  0.000000
9/29/2010	1:08:30 AM	Tube furnace set to 0
9/29/2010	1:09:30 AM	Helium valve closed
9/29/2010	1:09:30 AM	H2 valve closed
9/29/2010	1:09:30 AM	BCl3 valve closed
9/29/2010	1:09:30 AM	PH3 valve closed
9/29/2010	1:09:30 AM	SiCl4 pre valve closed
9/29/2010	1:09:30 AM	SiCl4 post valve closed
9/29/2010	1:09:30 AM	Bubbler valve closed
9/29/2010	1:09:30 AM	Main Vac valve opened
9/29/2010	1:09:30 AM	Bypass valve opened
9/29/2010	1:09:30 AM	Helium MFC set to  0.000000
9/29/2010	1:09:30 AM	H2 MFC set to  0.000000
9/29/2010	1:09:30 AM	BCl3 MFC set to  0.000000
9/29/2010	1:09:30 AM	PHl3 MFC set to  0.000000
9/29/2010	1:09:30 AM	SiCl4 MFC set to  0.000000
9/29/2010	1:09:30 AM	Bypass solenoid MFC set to  0.000000
9/29/2010	1:09:30 AM	Tube furnace set to 0
9/29/2010	1:10:30 AM	H2 valve closed
9/29/2010	1:10:30 AM	BCl3 valve closed
9/29/2010	1:10:30 AM	PH3 valve closed
9/29/2010	1:10:30 AM	SiCl4 pre valve closed
9/29/2010	1:10:30 AM	SiCl4 post valve closed
9/29/2010	1:10:30 AM	Bubbler valve closed
9/29/2010	1:10:30 AM	Helium valve opened
9/29/2010	1:10:30 AM	Main Vac valve opened
9/29/2010	1:10:30 AM	Bypass valve opened
9/29/2010	1:10:30 AM	Helium MFC set to  100.000000
9/29/2010	1:10:30 AM	H2 MFC set to  0.000000
9/29/2010	1:10:30 AM	BCl3 MFC set to  0.000000
9/29/2010	1:10:30 AM	PHl3 MFC set to  0.000000
9/29/2010	1:10:30 AM	SiCl4 MFC set to  0.000000
9/29/2010	1:10:30 AM	Bypass solenoid MFC set to  0.000000
9/29/2010	1:10:30 AM	Tube furnace set to 0
9/29/2010	1:11:30 AM	Helium valve closed
9/29/2010	1:11:30 AM	H2 valve closed
9/29/2010	1:11:30 AM	BCl3 valve closed
9/29/2010	1:11:30 AM	PH3 valve closed
9/29/2010	1:11:30 AM	SiCl4 pre valve closed
9/29/2010	1:11:30 AM	SiCl4 post valve closed
9/29/2010	1:11:30 AM	Bubbler valve closed
9/29/2010	1:11:30 AM	Main Vac valve opened
9/29/2010	1:11:30 AM	Bypass valve opened
9/29/2010	1:11:30 AM	Helium MFC set to  0.000000
9/29/2010	1:11:30 AM	H2 MFC set to  0.000000
9/29/2010	1:11:30 AM	BCl3 MFC set to  0.000000
9/29/2010	1:11:30 AM	PHl3 MFC set to  0.000000
9/29/2010	1:11:30 AM	SiCl4 MFC set to  0.000000
9/29/2010	1:11:30 AM	Bypass solenoid MFC set to  0.000000
9/29/2010	1:11:31 AM	Tube furnace set to 0
9/29/2010	1:12:31 AM	H2 valve closed
9/29/2010	1:12:31 AM	BCl3 valve closed
9/29/2010	1:12:31 AM	PH3 valve closed
9/29/2010	1:12:31 AM	SiCl4 pre valve closed
9/29/2010	1:12:31 AM	SiCl4 post valve closed
9/29/2010	1:12:31 AM	Bubbler valve closed
9/29/2010	1:12:31 AM	Helium valve opened
9/29/2010	1:12:31 AM	Main Vac valve opened
9/29/2010	1:12:31 AM	Bypass valve opened
9/29/2010	1:12:31 AM	Helium MFC set to  100.000000
9/29/2010	1:12:31 AM	H2 MFC set to  0.000000
9/29/2010	1:12:31 AM	BCl3 MFC set to  0.000000
9/29/2010	1:12:31 AM	PHl3 MFC set to  0.000000
9/29/2010	1:12:31 AM	SiCl4 MFC set to  0.000000
9/29/2010	1:12:31 AM	Bypass solenoid MFC set to  0.000000
9/29/2010	1:12:31 AM	Tube furnace set to 0
9/29/2010	1:13:31 AM	Helium valve closed
9/29/2010	1:13:31 AM	H2 valve closed
9/29/2010	1:13:31 AM	BCl3 valve closed
9/29/2010	1:13:31 AM	PH3 valve closed
9/29/2010	1:13:31 AM	SiCl4 pre valve closed
9/29/2010	1:13:31 AM	SiCl4 post valve closed
9/29/2010	1:13:31 AM	Bubbler valve closed
9/29/2010	1:13:31 AM	Main Vac valve opened
9/29/2010	1:13:31 AM	Bypass valve opened
9/29/2010	1:13:31 AM	Helium MFC set to  0.000000
9/29/2010	1:13:31 AM	H2 MFC set to  0.000000
9/29/2010	1:13:31 AM	BCl3 MFC set to  0.000000
9/29/2010	1:13:31 AM	PHl3 MFC set to  0.000000
9/29/2010	1:13:31 AM	SiCl4 MFC set to  0.000000
9/29/2010	1:13:31 AM	Bypass solenoid MFC set to  0.000000
9/29/2010	1:13:31 AM	Tube furnace set to 0
9/29/2010	1:14:31 AM	H2 valve closed
9/29/2010	1:14:31 AM	BCl3 valve closed
9/29/2010	1:14:31 AM	PH3 valve closed
9/29/2010	1:14:31 AM	SiCl4 pre valve closed
9/29/2010	1:14:31 AM	SiCl4 post valve closed
9/29/2010	1:14:31 AM	Bubbler valve closed
9/29/2010	1:14:31 AM	Helium valve opened
9/29/2010	1:14:31 AM	Main Vac valve opened
9/29/2010	1:14:31 AM	Bypass valve opened
9/29/2010	1:14:31 AM	Helium MFC set to  100.000000
9/29/2010	1:14:31 AM	H2 MFC set to  0.000000
9/29/2010	1:14:31 AM	BCl3 MFC set to  0.000000
9/29/2010	1:14:31 AM	PHl3 MFC set to  0.000000
9/29/2010	1:14:31 AM	SiCl4 MFC set to  0.000000
9/29/2010	1:14:31 AM	Bypass solenoid MFC set to  0.000000
9/29/2010	1:14:31 AM	Tube furnace set to 0
9/29/2010	1:15:31 AM	Helium valve closed
9/29/2010	1:15:31 AM	H2 valve closed
9/29/2010	1:15:31 AM	BCl3 valve closed
9/29/2010	1:15:31 AM	PH3 valve closed
9/29/2010	1:15:31 AM	SiCl4 pre valve closed
9/29/2010	1:15:31 AM	SiCl4 post valve closed
9/29/2010	1:15:31 AM	Bubbler valve closed
9/29/2010	1:15:31 AM	Main Vac valve opened
9/29/2010	1:15:31 AM	Bypass valve opened
9/29/2010	1:15:31 AM	Helium MFC set to  0.000000
9/29/2010	1:15:31 AM	H2 MFC set to  0.000000
9/29/2010	1:15:31 AM	BCl3 MFC set to  0.000000
9/29/2010	1:15:31 AM	PHl3 MFC set to  0.000000
9/29/2010	1:15:31 AM	SiCl4 MFC set to  0.000000
9/29/2010	1:15:31 AM	Bypass solenoid MFC set to  0.000000
9/29/2010	1:15:31 AM	Tube furnace set to 0
9/29/2010	1:15:32 AM	Run finished at 1:15 AM
9/29/2010	1:15:32 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/29/2010	1:16:10 AM	Bypass valve closed
9/29/2010	1:16:11 AM	Main Vac valve closed
9/29/2010	1:16:35 AM	Bypass valve opened
9/29/2010	1:16:36 AM	Main Vac valve opened
9/29/2010	1:16:39 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/29/2010	1:16:51 AM	Recipe started at 1:16 AM
9/29/2010	1:16:51 AM	Helium valve closed
9/29/2010	1:16:51 AM	H2 valve closed
9/29/2010	1:16:51 AM	BCl3 valve closed
9/29/2010	1:16:51 AM	PH3 valve closed
9/29/2010	1:16:51 AM	SiCl4 pre valve closed
9/29/2010	1:16:51 AM	SiCl4 post valve closed
9/29/2010	1:16:51 AM	Main Vac valve closed
9/29/2010	1:16:51 AM	Bubbler valve closed
9/29/2010	1:16:51 AM	Bypass valve opened
9/29/2010	1:16:51 AM	Helium MFC set to  0.000000
9/29/2010	1:16:51 AM	H2 MFC set to  0.000000
9/29/2010	1:16:51 AM	BCl3 MFC set to  0.000000
9/29/2010	1:16:51 AM	PHl3 MFC set to  0.000000
9/29/2010	1:16:51 AM	SiCl4 MFC set to  0.000000
9/29/2010	1:16:51 AM	Bypass solenoid MFC set to  0.000000
9/29/2010	1:16:52 AM	Tube furnace set to 0
9/29/2010	1:16:52 AM	Helium valve closed
9/29/2010	1:16:52 AM	H2 valve closed
9/29/2010	1:16:52 AM	BCl3 valve closed
9/29/2010	1:16:52 AM	PH3 valve closed
9/29/2010	1:16:52 AM	SiCl4 pre valve closed
9/29/2010	1:16:52 AM	SiCl4 post valve closed
9/29/2010	1:16:52 AM	Bubbler valve closed
9/29/2010	1:16:52 AM	Main Vac valve opened
9/29/2010	1:16:52 AM	Bypass valve opened
9/29/2010	1:16:52 AM	Helium MFC set to  0.000000
9/29/2010	1:16:52 AM	H2 MFC set to  0.000000
9/29/2010	1:16:52 AM	BCl3 MFC set to  0.000000
9/29/2010	1:16:52 AM	PHl3 MFC set to  0.000000
9/29/2010	1:16:52 AM	SiCl4 MFC set to  0.000000
9/29/2010	1:16:52 AM	Bypass solenoid MFC set to  0.000000
9/29/2010	1:16:52 AM	Tube furnace set to 0
9/29/2010	1:17:52 AM	H2 valve closed
9/29/2010	1:17:52 AM	BCl3 valve closed
9/29/2010	1:17:52 AM	PH3 valve closed
9/29/2010	1:17:52 AM	SiCl4 pre valve closed
9/29/2010	1:17:52 AM	SiCl4 post valve closed
9/29/2010	1:17:52 AM	Bubbler valve closed
9/29/2010	1:17:52 AM	Helium valve opened
9/29/2010	1:17:52 AM	Main Vac valve opened
9/29/2010	1:17:52 AM	Bypass valve opened
9/29/2010	1:17:52 AM	Helium MFC set to  100.000000
9/29/2010	1:17:52 AM	H2 MFC set to  0.000000
9/29/2010	1:17:52 AM	BCl3 MFC set to  0.000000
9/29/2010	1:17:52 AM	PHl3 MFC set to  0.000000
9/29/2010	1:17:52 AM	SiCl4 MFC set to  0.000000
9/29/2010	1:17:52 AM	Bypass solenoid MFC set to  0.000000
9/29/2010	1:17:52 AM	Tube furnace set to 0
9/29/2010	1:18:52 AM	Helium valve closed
9/29/2010	1:18:52 AM	H2 valve closed
9/29/2010	1:18:52 AM	BCl3 valve closed
9/29/2010	1:18:52 AM	PH3 valve closed
9/29/2010	1:18:52 AM	SiCl4 pre valve closed
9/29/2010	1:18:52 AM	SiCl4 post valve closed
9/29/2010	1:18:52 AM	Bubbler valve closed
9/29/2010	1:18:52 AM	Main Vac valve opened
9/29/2010	1:18:52 AM	Bypass valve opened
9/29/2010	1:18:52 AM	Helium MFC set to  0.000000
9/29/2010	1:18:52 AM	H2 MFC set to  0.000000
9/29/2010	1:18:52 AM	BCl3 MFC set to  0.000000
9/29/2010	1:18:52 AM	PHl3 MFC set to  0.000000
9/29/2010	1:18:52 AM	SiCl4 MFC set to  0.000000
9/29/2010	1:18:52 AM	Bypass solenoid MFC set to  0.000000
9/29/2010	1:18:52 AM	Tube furnace set to 0
9/29/2010	1:19:52 AM	H2 valve closed
9/29/2010	1:19:52 AM	BCl3 valve closed
9/29/2010	1:19:52 AM	PH3 valve closed
9/29/2010	1:19:52 AM	SiCl4 pre valve closed
9/29/2010	1:19:52 AM	SiCl4 post valve closed
9/29/2010	1:19:52 AM	Bubbler valve closed
9/29/2010	1:19:52 AM	Helium valve opened
9/29/2010	1:19:52 AM	Main Vac valve opened
9/29/2010	1:19:52 AM	Bypass valve opened
9/29/2010	1:19:52 AM	Helium MFC set to  100.000000
9/29/2010	1:19:52 AM	H2 MFC set to  0.000000
9/29/2010	1:19:52 AM	BCl3 MFC set to  0.000000
9/29/2010	1:19:52 AM	PHl3 MFC set to  0.000000
9/29/2010	1:19:52 AM	SiCl4 MFC set to  0.000000
9/29/2010	1:19:52 AM	Bypass solenoid MFC set to  0.000000
9/29/2010	1:19:53 AM	Tube furnace set to 0
9/29/2010	1:20:53 AM	Helium valve closed
9/29/2010	1:20:53 AM	H2 valve closed
9/29/2010	1:20:53 AM	BCl3 valve closed
9/29/2010	1:20:53 AM	PH3 valve closed
9/29/2010	1:20:53 AM	SiCl4 pre valve closed
9/29/2010	1:20:53 AM	SiCl4 post valve closed
9/29/2010	1:20:53 AM	Bubbler valve closed
9/29/2010	1:20:53 AM	Main Vac valve opened
9/29/2010	1:20:53 AM	Bypass valve opened
9/29/2010	1:20:53 AM	Helium MFC set to  0.000000
9/29/2010	1:20:53 AM	H2 MFC set to  0.000000
9/29/2010	1:20:53 AM	BCl3 MFC set to  0.000000
9/29/2010	1:20:53 AM	PHl3 MFC set to  0.000000
9/29/2010	1:20:53 AM	SiCl4 MFC set to  0.000000
9/29/2010	1:20:53 AM	Bypass solenoid MFC set to  0.000000
9/29/2010	1:20:53 AM	Tube furnace set to 0
9/29/2010	1:21:53 AM	H2 valve closed
9/29/2010	1:21:53 AM	BCl3 valve closed
9/29/2010	1:21:53 AM	PH3 valve closed
9/29/2010	1:21:53 AM	SiCl4 pre valve closed
9/29/2010	1:21:53 AM	SiCl4 post valve closed
9/29/2010	1:21:53 AM	Bubbler valve closed
9/29/2010	1:21:53 AM	Helium valve opened
9/29/2010	1:21:53 AM	Main Vac valve opened
9/29/2010	1:21:53 AM	Bypass valve opened
9/29/2010	1:21:53 AM	Helium MFC set to  100.000000
9/29/2010	1:21:53 AM	H2 MFC set to  0.000000
9/29/2010	1:21:53 AM	BCl3 MFC set to  0.000000
9/29/2010	1:21:53 AM	PHl3 MFC set to  0.000000
9/29/2010	1:21:53 AM	SiCl4 MFC set to  0.000000
9/29/2010	1:21:53 AM	Bypass solenoid MFC set to  0.000000
9/29/2010	1:21:53 AM	Tube furnace set to 0
9/29/2010	1:22:53 AM	Helium valve closed
9/29/2010	1:22:53 AM	H2 valve closed
9/29/2010	1:22:53 AM	BCl3 valve closed
9/29/2010	1:22:53 AM	PH3 valve closed
9/29/2010	1:22:53 AM	SiCl4 pre valve closed
9/29/2010	1:22:53 AM	SiCl4 post valve closed
9/29/2010	1:22:53 AM	Bubbler valve closed
9/29/2010	1:22:53 AM	Main Vac valve opened
9/29/2010	1:22:53 AM	Bypass valve opened
9/29/2010	1:22:53 AM	Helium MFC set to  0.000000
9/29/2010	1:22:53 AM	H2 MFC set to  0.000000
9/29/2010	1:22:53 AM	BCl3 MFC set to  0.000000
9/29/2010	1:22:53 AM	PHl3 MFC set to  0.000000
9/29/2010	1:22:53 AM	SiCl4 MFC set to  0.000000
9/29/2010	1:22:53 AM	Bypass solenoid MFC set to  0.000000
9/29/2010	1:22:53 AM	Tube furnace set to 0
9/29/2010	1:23:53 AM	H2 valve closed
9/29/2010	1:23:53 AM	BCl3 valve closed
9/29/2010	1:23:53 AM	PH3 valve closed
9/29/2010	1:23:53 AM	SiCl4 pre valve closed
9/29/2010	1:23:53 AM	SiCl4 post valve closed
9/29/2010	1:23:53 AM	Bubbler valve closed
9/29/2010	1:23:53 AM	Helium valve opened
9/29/2010	1:23:53 AM	Main Vac valve opened
9/29/2010	1:23:53 AM	Bypass valve opened
9/29/2010	1:23:53 AM	Helium MFC set to  100.000000
9/29/2010	1:23:53 AM	H2 MFC set to  0.000000
9/29/2010	1:23:53 AM	BCl3 MFC set to  0.000000
9/29/2010	1:23:53 AM	PHl3 MFC set to  0.000000
9/29/2010	1:23:53 AM	SiCl4 MFC set to  0.000000
9/29/2010	1:23:53 AM	Bypass solenoid MFC set to  0.000000
9/29/2010	1:23:53 AM	Tube furnace set to 0
9/29/2010	1:24:53 AM	Helium valve closed
9/29/2010	1:24:53 AM	H2 valve closed
9/29/2010	1:24:53 AM	BCl3 valve closed
9/29/2010	1:24:53 AM	PH3 valve closed
9/29/2010	1:24:53 AM	SiCl4 pre valve closed
9/29/2010	1:24:53 AM	SiCl4 post valve closed
9/29/2010	1:24:53 AM	Bubbler valve closed
9/29/2010	1:24:53 AM	Main Vac valve opened
9/29/2010	1:24:53 AM	Bypass valve opened
9/29/2010	1:24:53 AM	Helium MFC set to  0.000000
9/29/2010	1:24:53 AM	H2 MFC set to  0.000000
9/29/2010	1:24:53 AM	BCl3 MFC set to  0.000000
9/29/2010	1:24:53 AM	PHl3 MFC set to  0.000000
9/29/2010	1:24:53 AM	SiCl4 MFC set to  0.000000
9/29/2010	1:24:53 AM	Bypass solenoid MFC set to  0.000000
9/29/2010	1:24:54 AM	Tube furnace set to 0
9/29/2010	1:25:54 AM	H2 valve closed
9/29/2010	1:25:54 AM	BCl3 valve closed
9/29/2010	1:25:54 AM	PH3 valve closed
9/29/2010	1:25:54 AM	SiCl4 pre valve closed
9/29/2010	1:25:54 AM	SiCl4 post valve closed
9/29/2010	1:25:54 AM	Bubbler valve closed
9/29/2010	1:25:54 AM	Helium valve opened
9/29/2010	1:25:54 AM	Main Vac valve opened
9/29/2010	1:25:54 AM	Bypass valve opened
9/29/2010	1:25:54 AM	Helium MFC set to  100.000000
9/29/2010	1:25:54 AM	H2 MFC set to  0.000000
9/29/2010	1:25:54 AM	BCl3 MFC set to  0.000000
9/29/2010	1:25:54 AM	PHl3 MFC set to  0.000000
9/29/2010	1:25:54 AM	SiCl4 MFC set to  0.000000
9/29/2010	1:25:54 AM	Bypass solenoid MFC set to  0.000000
9/29/2010	1:25:54 AM	Tube furnace set to 0
9/29/2010	1:26:54 AM	Helium valve closed
9/29/2010	1:26:54 AM	H2 valve closed
9/29/2010	1:26:54 AM	BCl3 valve closed
9/29/2010	1:26:54 AM	PH3 valve closed
9/29/2010	1:26:54 AM	SiCl4 pre valve closed
9/29/2010	1:26:54 AM	SiCl4 post valve closed
9/29/2010	1:26:54 AM	Bubbler valve closed
9/29/2010	1:26:54 AM	Main Vac valve opened
9/29/2010	1:26:54 AM	Bypass valve opened
9/29/2010	1:26:54 AM	Helium MFC set to  0.000000
9/29/2010	1:26:54 AM	H2 MFC set to  0.000000
9/29/2010	1:26:54 AM	BCl3 MFC set to  0.000000
9/29/2010	1:26:54 AM	PHl3 MFC set to  0.000000
9/29/2010	1:26:54 AM	SiCl4 MFC set to  0.000000
9/29/2010	1:26:54 AM	Bypass solenoid MFC set to  0.000000
9/29/2010	1:26:54 AM	Tube furnace set to 0
9/29/2010	1:27:54 AM	H2 valve closed
9/29/2010	1:27:54 AM	BCl3 valve closed
9/29/2010	1:27:54 AM	PH3 valve closed
9/29/2010	1:27:54 AM	SiCl4 pre valve closed
9/29/2010	1:27:54 AM	SiCl4 post valve closed
9/29/2010	1:27:54 AM	Bubbler valve closed
9/29/2010	1:27:54 AM	Helium valve opened
9/29/2010	1:27:54 AM	Main Vac valve opened
9/29/2010	1:27:54 AM	Bypass valve opened
9/29/2010	1:27:54 AM	Helium MFC set to  100.000000
9/29/2010	1:27:54 AM	H2 MFC set to  0.000000
9/29/2010	1:27:54 AM	BCl3 MFC set to  0.000000
9/29/2010	1:27:54 AM	PHl3 MFC set to  0.000000
9/29/2010	1:27:54 AM	SiCl4 MFC set to  0.000000
9/29/2010	1:27:54 AM	Bypass solenoid MFC set to  0.000000
9/29/2010	1:27:54 AM	Tube furnace set to 0
9/29/2010	1:28:54 AM	Helium valve closed
9/29/2010	1:28:54 AM	H2 valve closed
9/29/2010	1:28:54 AM	BCl3 valve closed
9/29/2010	1:28:54 AM	PH3 valve closed
9/29/2010	1:28:54 AM	SiCl4 pre valve closed
9/29/2010	1:28:54 AM	SiCl4 post valve closed
9/29/2010	1:28:54 AM	Bubbler valve closed
9/29/2010	1:28:54 AM	Main Vac valve opened
9/29/2010	1:28:54 AM	Bypass valve opened
9/29/2010	1:28:54 AM	Helium MFC set to  0.000000
9/29/2010	1:28:54 AM	H2 MFC set to  0.000000
9/29/2010	1:28:54 AM	BCl3 MFC set to  0.000000
9/29/2010	1:28:54 AM	PHl3 MFC set to  0.000000
9/29/2010	1:28:54 AM	SiCl4 MFC set to  0.000000
9/29/2010	1:28:54 AM	Bypass solenoid MFC set to  0.000000
9/29/2010	1:28:54 AM	Tube furnace set to 0
9/29/2010	1:29:54 AM	H2 valve closed
9/29/2010	1:29:54 AM	BCl3 valve closed
9/29/2010	1:29:54 AM	PH3 valve closed
9/29/2010	1:29:54 AM	SiCl4 pre valve closed
9/29/2010	1:29:54 AM	SiCl4 post valve closed
9/29/2010	1:29:54 AM	Bubbler valve closed
9/29/2010	1:29:54 AM	Helium valve opened
9/29/2010	1:29:54 AM	Main Vac valve opened
9/29/2010	1:29:54 AM	Bypass valve opened
9/29/2010	1:29:54 AM	Helium MFC set to  100.000000
9/29/2010	1:29:54 AM	H2 MFC set to  0.000000
9/29/2010	1:29:54 AM	BCl3 MFC set to  0.000000
9/29/2010	1:29:54 AM	PHl3 MFC set to  0.000000
9/29/2010	1:29:54 AM	SiCl4 MFC set to  0.000000
9/29/2010	1:29:54 AM	Bypass solenoid MFC set to  0.000000
9/29/2010	1:29:55 AM	Tube furnace set to 0
9/29/2010	1:30:55 AM	Helium valve closed
9/29/2010	1:30:55 AM	H2 valve closed
9/29/2010	1:30:55 AM	BCl3 valve closed
9/29/2010	1:30:55 AM	PH3 valve closed
9/29/2010	1:30:55 AM	SiCl4 pre valve closed
9/29/2010	1:30:55 AM	SiCl4 post valve closed
9/29/2010	1:30:55 AM	Bubbler valve closed
9/29/2010	1:30:55 AM	Main Vac valve opened
9/29/2010	1:30:55 AM	Bypass valve opened
9/29/2010	1:30:55 AM	Helium MFC set to  0.000000
9/29/2010	1:30:55 AM	H2 MFC set to  0.000000
9/29/2010	1:30:55 AM	BCl3 MFC set to  0.000000
9/29/2010	1:30:55 AM	PHl3 MFC set to  0.000000
9/29/2010	1:30:55 AM	SiCl4 MFC set to  0.000000
9/29/2010	1:30:55 AM	Bypass solenoid MFC set to  0.000000
9/29/2010	1:30:55 AM	Tube furnace set to 0
9/29/2010	1:31:55 AM	H2 valve closed
9/29/2010	1:31:55 AM	BCl3 valve closed
9/29/2010	1:31:55 AM	PH3 valve closed
9/29/2010	1:31:55 AM	SiCl4 pre valve closed
9/29/2010	1:31:55 AM	SiCl4 post valve closed
9/29/2010	1:31:55 AM	Bubbler valve closed
9/29/2010	1:31:55 AM	Helium valve opened
9/29/2010	1:31:55 AM	Main Vac valve opened
9/29/2010	1:31:55 AM	Bypass valve opened
9/29/2010	1:31:55 AM	Helium MFC set to  100.000000
9/29/2010	1:31:55 AM	H2 MFC set to  0.000000
9/29/2010	1:31:55 AM	BCl3 MFC set to  0.000000
9/29/2010	1:31:55 AM	PHl3 MFC set to  0.000000
9/29/2010	1:31:55 AM	SiCl4 MFC set to  0.000000
9/29/2010	1:31:55 AM	Bypass solenoid MFC set to  0.000000
9/29/2010	1:31:55 AM	Tube furnace set to 0
9/29/2010	1:32:55 AM	Helium valve closed
9/29/2010	1:32:55 AM	H2 valve closed
9/29/2010	1:32:55 AM	BCl3 valve closed
9/29/2010	1:32:55 AM	PH3 valve closed
9/29/2010	1:32:55 AM	SiCl4 pre valve closed
9/29/2010	1:32:55 AM	SiCl4 post valve closed
9/29/2010	1:32:55 AM	Bubbler valve closed
9/29/2010	1:32:55 AM	Main Vac valve opened
9/29/2010	1:32:55 AM	Bypass valve opened
9/29/2010	1:32:55 AM	Helium MFC set to  0.000000
9/29/2010	1:32:55 AM	H2 MFC set to  0.000000
9/29/2010	1:32:55 AM	BCl3 MFC set to  0.000000
9/29/2010	1:32:55 AM	PHl3 MFC set to  0.000000
9/29/2010	1:32:55 AM	SiCl4 MFC set to  0.000000
9/29/2010	1:32:55 AM	Bypass solenoid MFC set to  0.000000
9/29/2010	1:32:55 AM	Tube furnace set to 0
9/29/2010	1:33:55 AM	H2 valve closed
9/29/2010	1:33:55 AM	BCl3 valve closed
9/29/2010	1:33:55 AM	PH3 valve closed
9/29/2010	1:33:55 AM	SiCl4 pre valve closed
9/29/2010	1:33:55 AM	SiCl4 post valve closed
9/29/2010	1:33:55 AM	Bubbler valve closed
9/29/2010	1:33:55 AM	Helium valve opened
9/29/2010	1:33:55 AM	Main Vac valve opened
9/29/2010	1:33:55 AM	Bypass valve opened
9/29/2010	1:33:55 AM	Helium MFC set to  100.000000
9/29/2010	1:33:55 AM	H2 MFC set to  0.000000
9/29/2010	1:33:55 AM	BCl3 MFC set to  0.000000
9/29/2010	1:33:55 AM	PHl3 MFC set to  0.000000
9/29/2010	1:33:55 AM	SiCl4 MFC set to  0.000000
9/29/2010	1:33:55 AM	Bypass solenoid MFC set to  0.000000
9/29/2010	1:33:55 AM	Tube furnace set to 0
9/29/2010	1:34:55 AM	Helium valve closed
9/29/2010	1:34:55 AM	H2 valve closed
9/29/2010	1:34:55 AM	BCl3 valve closed
9/29/2010	1:34:55 AM	PH3 valve closed
9/29/2010	1:34:55 AM	SiCl4 pre valve closed
9/29/2010	1:34:55 AM	SiCl4 post valve closed
9/29/2010	1:34:55 AM	Bubbler valve closed
9/29/2010	1:34:55 AM	Main Vac valve opened
9/29/2010	1:34:55 AM	Bypass valve opened
9/29/2010	1:34:55 AM	Helium MFC set to  0.000000
9/29/2010	1:34:55 AM	H2 MFC set to  0.000000
9/29/2010	1:34:55 AM	BCl3 MFC set to  0.000000
9/29/2010	1:34:55 AM	PHl3 MFC set to  0.000000
9/29/2010	1:34:55 AM	SiCl4 MFC set to  0.000000
9/29/2010	1:34:55 AM	Bypass solenoid MFC set to  0.000000
9/29/2010	1:34:56 AM	Tube furnace set to 0
9/29/2010	1:35:56 AM	H2 valve closed
9/29/2010	1:35:56 AM	BCl3 valve closed
9/29/2010	1:35:56 AM	PH3 valve closed
9/29/2010	1:35:56 AM	SiCl4 pre valve closed
9/29/2010	1:35:56 AM	SiCl4 post valve closed
9/29/2010	1:35:56 AM	Bubbler valve closed
9/29/2010	1:35:56 AM	Helium valve opened
9/29/2010	1:35:56 AM	Main Vac valve opened
9/29/2010	1:35:56 AM	Bypass valve opened
9/29/2010	1:35:56 AM	Helium MFC set to  100.000000
9/29/2010	1:35:56 AM	H2 MFC set to  0.000000
9/29/2010	1:35:56 AM	BCl3 MFC set to  0.000000
9/29/2010	1:35:56 AM	PHl3 MFC set to  0.000000
9/29/2010	1:35:56 AM	SiCl4 MFC set to  0.000000
9/29/2010	1:35:56 AM	Bypass solenoid MFC set to  0.000000
9/29/2010	1:35:56 AM	Tube furnace set to 0
9/29/2010	1:36:56 AM	Helium valve closed
9/29/2010	1:36:56 AM	H2 valve closed
9/29/2010	1:36:56 AM	BCl3 valve closed
9/29/2010	1:36:56 AM	PH3 valve closed
9/29/2010	1:36:56 AM	SiCl4 pre valve closed
9/29/2010	1:36:56 AM	SiCl4 post valve closed
9/29/2010	1:36:56 AM	Bubbler valve closed
9/29/2010	1:36:56 AM	Main Vac valve opened
9/29/2010	1:36:56 AM	Bypass valve opened
9/29/2010	1:36:56 AM	Helium MFC set to  0.000000
9/29/2010	1:36:56 AM	H2 MFC set to  0.000000
9/29/2010	1:36:56 AM	BCl3 MFC set to  0.000000
9/29/2010	1:36:56 AM	PHl3 MFC set to  0.000000
9/29/2010	1:36:56 AM	SiCl4 MFC set to  0.000000
9/29/2010	1:36:56 AM	Bypass solenoid MFC set to  0.000000
9/29/2010	1:36:56 AM	Tube furnace set to 0
9/29/2010	1:36:57 AM	Run finished at 1:36 AM
9/29/2010	1:36:57 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/29/2010	1:41:47 AM	Recipe started at 1:41 AM
9/29/2010	1:41:47 AM	Helium valve closed
9/29/2010	1:41:47 AM	BCl3 valve closed
9/29/2010	1:41:47 AM	PH3 valve closed
9/29/2010	1:41:47 AM	SiCl4 pre valve closed
9/29/2010	1:41:47 AM	SiCl4 post valve closed
9/29/2010	1:41:47 AM	Main Vac valve closed
9/29/2010	1:41:47 AM	Bypass valve closed
9/29/2010	1:41:47 AM	Bubbler valve closed
9/29/2010	1:41:47 AM	H2 valve opened
9/29/2010	1:41:47 AM	Helium MFC set to  0.000000
9/29/2010	1:41:47 AM	H2 MFC set to  500.000000
9/29/2010	1:41:47 AM	BCl3 MFC set to  0.000000
9/29/2010	1:41:47 AM	PHl3 MFC set to  0.000000
9/29/2010	1:41:47 AM	SiCl4 MFC set to  0.000000
9/29/2010	1:41:47 AM	Bypass solenoid MFC set to  0.000000
9/29/2010	1:41:47 AM	Tube furnace set to 0
9/29/2010	1:43:06 AM	Helium valve closed
9/29/2010	1:43:06 AM	BCl3 valve closed
9/29/2010	1:43:06 AM	PH3 valve closed
9/29/2010	1:43:06 AM	SiCl4 pre valve closed
9/29/2010	1:43:06 AM	SiCl4 post valve closed
9/29/2010	1:43:06 AM	Main Vac valve closed
9/29/2010	1:43:06 AM	Bypass valve closed
9/29/2010	1:43:06 AM	H2 valve opened
9/29/2010	1:43:06 AM	Bubbler valve opened
9/29/2010	1:43:06 AM	Helium MFC set to  0.000000
9/29/2010	1:43:06 AM	H2 MFC set to  500.000000
9/29/2010	1:43:06 AM	BCl3 MFC set to  0.000000
9/29/2010	1:43:06 AM	PHl3 MFC set to  0.000000
9/29/2010	1:43:06 AM	SiCl4 MFC set to  0.000000
9/29/2010	1:43:06 AM	Bypass solenoid MFC set to  0.000000
9/29/2010	1:43:06 AM	Tube furnace set to 1000
9/29/2010	2:13:06 AM	Helium valve closed
9/29/2010	2:13:06 AM	BCl3 valve closed
9/29/2010	2:13:06 AM	PH3 valve closed
9/29/2010	2:13:06 AM	Main Vac valve closed
9/29/2010	2:13:06 AM	Bypass valve closed
9/29/2010	2:13:06 AM	H2 valve opened
9/29/2010	2:13:06 AM	SiCl4 pre valve opened
9/29/2010	2:13:06 AM	SiCl4 post valve opened
9/29/2010	2:13:06 AM	Bubbler valve opened
9/29/2010	2:13:06 AM	Helium MFC set to  0.000000
9/29/2010	2:13:06 AM	H2 MFC set to  500.000000
9/29/2010	2:13:06 AM	BCl3 MFC set to  0.000000
9/29/2010	2:13:06 AM	PHl3 MFC set to  0.000000
9/29/2010	2:13:06 AM	SiCl4 MFC set to  50.000000
9/29/2010	2:13:06 AM	Bypass solenoid MFC set to  0.000000
9/29/2010	2:13:07 AM	Tube furnace set to 1000
9/29/2010	2:33:07 AM	H2 valve closed
9/29/2010	2:33:07 AM	BCl3 valve closed
9/29/2010	2:33:07 AM	PH3 valve closed
9/29/2010	2:33:07 AM	SiCl4 pre valve closed
9/29/2010	2:33:07 AM	SiCl4 post valve closed
9/29/2010	2:33:07 AM	Main Vac valve closed
9/29/2010	2:33:07 AM	Bypass valve closed
9/29/2010	2:33:07 AM	Helium valve opened
9/29/2010	2:33:07 AM	Bubbler valve opened
9/29/2010	2:33:07 AM	Helium MFC set to  500.000000
9/29/2010	2:33:07 AM	H2 MFC set to  0.000000
9/29/2010	2:33:07 AM	BCl3 MFC set to  0.000000
9/29/2010	2:33:07 AM	PHl3 MFC set to  0.000000
9/29/2010	2:33:07 AM	SiCl4 MFC set to  0.000000
9/29/2010	2:33:07 AM	Bypass solenoid MFC set to  0.000000
9/29/2010	2:33:07 AM	Tube furnace set to 0
9/29/2010	2:53:07 AM	Helium valve closed
9/29/2010	2:53:07 AM	H2 valve closed
9/29/2010	2:53:07 AM	BCl3 valve closed
9/29/2010	2:53:07 AM	PH3 valve closed
9/29/2010	2:53:07 AM	SiCl4 pre valve closed
9/29/2010	2:53:07 AM	SiCl4 post valve closed
9/29/2010	2:53:07 AM	Main Vac valve closed
9/29/2010	2:53:07 AM	Bypass valve closed
9/29/2010	2:53:07 AM	Bubbler valve closed
9/29/2010	2:53:07 AM	Helium MFC set to  0.000000
9/29/2010	2:53:07 AM	H2 MFC set to  0.000000
9/29/2010	2:53:07 AM	BCl3 MFC set to  0.000000
9/29/2010	2:53:07 AM	PHl3 MFC set to  0.000000
9/29/2010	2:53:07 AM	SiCl4 MFC set to  0.000000
9/29/2010	2:53:07 AM	Bypass solenoid MFC set to  0.000000
9/29/2010	2:53:07 AM	Tube furnace set to 0
9/29/2010	2:53:07 AM	Run finished at 2:53 AM
9/29/2010	3:11:43 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/29/2010	3:11:44 AM	Recipe started at 3:11 AM
9/29/2010	3:11:44 AM	H2 valve closed
9/29/2010	3:11:44 AM	BCl3 valve closed
9/29/2010	3:11:44 AM	PH3 valve closed
9/29/2010	3:11:44 AM	SiCl4 pre valve closed
9/29/2010	3:11:44 AM	SiCl4 post valve closed
9/29/2010	3:11:44 AM	Main Vac valve closed
9/29/2010	3:11:44 AM	Bypass valve closed
9/29/2010	3:11:44 AM	Bubbler valve closed
9/29/2010	3:11:44 AM	Helium valve opened
9/29/2010	3:11:44 AM	Helium MFC set to  500.000000
9/29/2010	3:11:44 AM	H2 MFC set to  0.000000
9/29/2010	3:11:44 AM	BCl3 MFC set to  0.000000
9/29/2010	3:11:44 AM	PHl3 MFC set to  0.000000
9/29/2010	3:11:44 AM	SiCl4 MFC set to  0.000000
9/29/2010	3:11:44 AM	Bypass solenoid MFC set to  0.000000
9/29/2010	3:11:44 AM	Tube furnace set to 0
9/29/2010	3:11:50 AM	Helium valve closed
9/29/2010	3:11:50 AM	H2 valve closed
9/29/2010	3:11:50 AM	BCl3 valve closed
9/29/2010	3:11:50 AM	PH3 valve closed
9/29/2010	3:11:50 AM	SiCl4 pre valve closed
9/29/2010	3:11:50 AM	SiCl4 post valve closed
9/29/2010	3:11:50 AM	Main Vac valve closed
9/29/2010	3:11:50 AM	Bypass valve closed
9/29/2010	3:11:50 AM	Bubbler valve closed
9/29/2010	3:11:50 AM	Helium MFC set to  0.000000
9/29/2010	3:11:50 AM	H2 MFC set to  0.000000
9/29/2010	3:11:50 AM	BCl3 MFC set to  0.000000
9/29/2010	3:11:50 AM	PHl3 MFC set to  0.000000
9/29/2010	3:11:50 AM	SiCl4 MFC set to  0.000000
9/29/2010	3:11:50 AM	Bypass solenoid MFC set to  0.000000
9/29/2010	3:11:51 AM	Tube furnace set to 0
9/29/2010	3:11:51 AM	Run finished at 3:11 AM
9/29/2010	3:11:51 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/29/2010	3:14:20 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/29/2010	3:14:21 AM	Recipe started at 3:14 AM
9/29/2010	3:14:21 AM	Helium valve closed
9/29/2010	3:14:21 AM	H2 valve closed
9/29/2010	3:14:21 AM	BCl3 valve closed
9/29/2010	3:14:21 AM	PH3 valve closed
9/29/2010	3:14:21 AM	SiCl4 pre valve closed
9/29/2010	3:14:21 AM	SiCl4 post valve closed
9/29/2010	3:14:21 AM	Main Vac valve closed
9/29/2010	3:14:21 AM	Bubbler valve closed
9/29/2010	3:14:21 AM	Bypass valve opened
9/29/2010	3:14:21 AM	Helium MFC set to  0.000000
9/29/2010	3:14:21 AM	H2 MFC set to  0.000000
9/29/2010	3:14:21 AM	BCl3 MFC set to  0.000000
9/29/2010	3:14:21 AM	PHl3 MFC set to  0.000000
9/29/2010	3:14:21 AM	SiCl4 MFC set to  0.000000
9/29/2010	3:14:21 AM	Bypass solenoid MFC set to  0.000000
9/29/2010	3:14:21 AM	Tube furnace set to 0
9/29/2010	3:15:02 AM	Helium valve closed
9/29/2010	3:15:02 AM	H2 valve closed
9/29/2010	3:15:02 AM	BCl3 valve closed
9/29/2010	3:15:02 AM	PH3 valve closed
9/29/2010	3:15:02 AM	SiCl4 pre valve closed
9/29/2010	3:15:02 AM	SiCl4 post valve closed
9/29/2010	3:15:02 AM	Bubbler valve closed
9/29/2010	3:15:02 AM	Main Vac valve opened
9/29/2010	3:15:02 AM	Bypass valve opened
9/29/2010	3:15:02 AM	Helium MFC set to  0.000000
9/29/2010	3:15:02 AM	H2 MFC set to  0.000000
9/29/2010	3:15:02 AM	BCl3 MFC set to  0.000000
9/29/2010	3:15:02 AM	PHl3 MFC set to  0.000000
9/29/2010	3:15:02 AM	SiCl4 MFC set to  0.000000
9/29/2010	3:15:02 AM	Bypass solenoid MFC set to  0.000000
9/29/2010	3:15:02 AM	Tube furnace set to 0
9/29/2010	3:15:02 AM	Run finished at 3:15 AM
9/29/2010	3:15:02 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/29/2010	3:15:20 AM	Bypass valve closed
9/29/2010	3:15:21 AM	Main Vac valve closed
9/29/2010	3:15:33 AM	Main Vac valve opened
9/29/2010	3:15:34 AM	Bypass valve opened
